Financial Wire

Rigaku Expands Chip Metrology Tie-Up With Onto Innovation

-- Rigaku (TYO:268A) agreed to a capital and business alliance with Onto Innovation, alongside a share transfer that will change its largest shareholder, according to a Tuesday filing on the Tokyo Stock Exchange.

Onto Innovation will acquire about 61.1 million shares, or 27% of Rigaku, from Atom Investment in the second half of 2026, subject to regulatory approvals. The move will make Onto Innovation the top shareholder, while Atom's stake will be reduced.

The tie-up expands an existing collaboration in semiconductor metrology, combining Rigaku's X-ray technology with Onto's optical and analytics capabilities to develop tools for advanced logic, memory and packaging.

The companies also plan to deepen cooperation across research, production and sales, while increasing use of software and AI and tapping Onto's global customer base.

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